Module 6NE: Micro and nano electromechanical systems (ELEC5500)
MEMS and NEMS form the basis of modern sensors and actuators, and are now used in many products - including those produced by the IT, biomedical and automotive industries.
On completion of this module, students will be able to:
- Explain how Micro and Nano Electromechanical Systems (MEMS and NEMS) operate.
- Describe the fabrication process and the choice of materials.
- Discuss the advantages and disadvantages of different approaches to the implementation of a given functionality.
- Carry out simple calculations that quantify the performance of different structures.
Outline syllabus
- Microsensors: thermal sensors, radiation sensors, magnetic sensors, chemical sensors, mechanical sensors.
- Microactuators.
- Extension to the nanoscale.
- Microcomponent assembly and packing.
Back to: Nanoelectronics and nanomechanics
