Module 8NE: Next generation silicon technologies (ELEC5200)
Never underestimate an established technology - silicon offers proven performance, and new fabrication technologies offer intense competition for novel materials...
On completion of this module, you will be able to:
- Demonstrate an understanding of silicon chip fabrication and the technical issues which must be faced to ensure future progress in this technology.
- Be familiar with the most important aspects of silicon chip fabrication technology.
- Gain an appreciation of the technical challenges to future developments and the proposed solutions.
Outline syllabus
- Basics of Si technology, including processing: crystal growth, oxidation, doping, metalisation, lithography, design rules, packaging, yield.
- Moore's Law and fundamental limits.
- The Semiconductor Roadmap: lLithography, quantum effects, low k dielectrics, heat dissipation, discrete doping effects, metalisation.
Back to: Nanoelectronics and nanomechanics
